发明名称 |
Plasma resistant quartz glass jig. |
摘要 |
It is an object of the present invention to provide a quartz glass jig excellent in the plasma etching resistant characteristics, which does not generate an abnormal etching and particles when used for a plasma generating apparatus. The above Object is obtained by a plasma resistant quartz glass jig that is used for an apparatus of generating plasma, wherein the surface roughness Ra of the quartz glass surface is in a range of from 5 mu m to 0.05 mu m, the number of microcracks of the surface is not more than 500 microcracks/cm<2>, and the hydrogen molecule concentration in the quartz glass is at least 5 x 10<16> molecules/cm<3>. |
申请公布号 |
SG116424(A1) |
申请公布日期 |
2005.11.28 |
申请号 |
SG20010005181 |
申请日期 |
2001.08.24 |
申请人 |
SHIN-ETSU QUARTZ PRODUCTS CO., LTD. |
发明人 |
KYOICHI INAKI;NAOKI HAYASHI;TOHRU SEGAWA |
分类号 |
H01L21/3065;C03C3/06;H01J37/32;H01L21/00;H01L21/687;(IPC1-7):C30B20/00;C30C15/00 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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