| 摘要 |
PURPOSE:To easily form a space on a piezoelectric element by forming two pairs of opposed resonance/exciting electrodes on one and same piezoelectric ceramic, providing the surrounding of a thermosetting resin to the entire piezoelectric element or around the resonance/exciting electrodes so as to coat the entire piezoelectric resin by the resin. CONSTITUTION:In the case of the thickness-shear vibration, the surrounding 12 of the thermosetting resin is provided around the piezoelectric element while not sticking to the piezoelectric element itself. The height of the surroundings 12, 13 is selected at least to be the thickness of the piezoelectric element. Thus, a space of several tens mu is formed to the boundary between the coating resin and the piezoelectric element in the surrounding 12, 13. That is, in cooled the coating resin from a heating state, the resin is cooled from the surface of the coating resin in contact and the inside is cooled at least. In this case, an internal stress in exerted from the inner to the outer direction to the coating resin stuck to the surrounding 12, 13 placed at the inside of the coating resin due to the thermal expansion coefficient and the coating resin is exfoliated.
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