| 摘要 |
<p>PURPOSE:To make possible the positioning of a microscopic step by a method wherein in the case the positioning of an object to be transferred is not completed within an allowed time, oil at the contact part of the object is in between the guide of the contact part and a frame from the periphery of a targeted position, an oil film at the contact part is returned to the initial state and the object is again positioned. CONSTITUTION:When an object to be transferred is driven, the state of a friction contact part of the object is decided and when the state of the contact part is decided that the state is bad, the object is first made a long-stroke drive from a prescribed position and after that, is positioned at a targeted position. In such a way, when the state of the contact part is bad, such as in the case the positioning of the object is not completed within an allowed positioning time, the drive path of the positioning is made long, whereby oil is primed in between a guide 6 of the contact part and a frame 7 from the periphery of the targeted position by a wedge effect, an oil film at the contact part is returned to the initial state and the object is again positioned in this state. Thereby, the positioning of a microscopic step can be performed.</p> |
