| 发明名称 |
OPTICAL ELEMENT HAVING TWO PHASE MASKS |
| 摘要 |
An optical element is disclosed. The optical element comprises: a first phase shift mask formed on a first optical material and constituted to generate a positive phase shift, and a second phase shift mask formed on a second optical material and constituted to generate a negative phase shift, wherein the phase shift masks are arranged serially on an optical axis, and wherein a refractive index of at least one of the first and second optical materials varies with the temperature at a rate of at least 50×10−6 per degree Kelvin. |
| 申请公布号 |
US2016379030(A1) |
申请公布日期 |
2016.12.29 |
| 申请号 |
US201414903287 |
申请日期 |
2014.07.08 |
| 申请人 |
RAMOT AT TEL-AVIV UNIVERSITY |
发明人 |
ELMALEM Shay;MAROM Emanuel;HAIM Harel;KONFORTI Naim |
| 分类号 |
G06K7/14;G06K19/06;G02B27/00;G02F1/01;G02B5/18 |
主分类号 |
G06K7/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An optical element, comprising:
a first phase shift mask formed on a first optical material and constituted to generate a positive phase shift, and a second phase shift mask formed on a second optical material and constituted to generate a negative phase shift, wherein said phase shift masks are arranged serially on an optical axis, and wherein a refractive index of at least one of the first and second optical materials varies with the temperature at a rate of at least 50×10−6 per degree Kelvin. |
| 地址 |
Tel-aviv IL |
