发明名称 APPARATUS AND METHOD FOR DEPOSITING FILM, AND MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for depositing a film which improves a yield and ensures high quality, and to provide a method for depositing a film and a magnetic recording medium. SOLUTION: Film deposition is performed on a vapor deposition tape 11 in which a magnetic layer is vapor-deposited on one surface in a reaction tube 13 by a plasma reaction. A wrapping unit for performing wrapping processing on one surface of the vapor deposition tape 11 in vacuum, is provided at a proper place of the upstream side or the downstream side of the reaction tube 13. Rolls 1 and 2 supported rotatably on the other surface side of the vapor deposition tape 11 and a wrapping roll 4 supported rotatably by one surface side are made to approach each other. A magnetic layer is wrapped by contacting a wrapping tape 8 wound around the wrapping roll 4 with the vapor deposition tape 11 by pressure.
申请公布号 JP2002237028(A) 申请公布日期 2002.08.23
申请号 JP20010031551 申请日期 2001.02.07
申请人 SONY CORP 发明人 SHIBATA KEIICHI
分类号 C23C16/02;C23C16/27;C23C16/56;G11B5/72;G11B5/84;(IPC1-7):G11B5/84 主分类号 C23C16/02
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