摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for depositing a film which improves a yield and ensures high quality, and to provide a method for depositing a film and a magnetic recording medium. SOLUTION: Film deposition is performed on a vapor deposition tape 11 in which a magnetic layer is vapor-deposited on one surface in a reaction tube 13 by a plasma reaction. A wrapping unit for performing wrapping processing on one surface of the vapor deposition tape 11 in vacuum, is provided at a proper place of the upstream side or the downstream side of the reaction tube 13. Rolls 1 and 2 supported rotatably on the other surface side of the vapor deposition tape 11 and a wrapping roll 4 supported rotatably by one surface side are made to approach each other. A magnetic layer is wrapped by contacting a wrapping tape 8 wound around the wrapping roll 4 with the vapor deposition tape 11 by pressure.
|