SEMICONDUCTOR MANUFACTURING APPARATUS HAVING COOLING TRAP

摘要

PURPOSE: A semiconductor manufacturing apparatus having a cooling trap is provided to easily and simply perform a cleaning process without influences to a process tube and a pump operation. CONSTITUTION: A semiconductor manufacturing apparatus comprises a process tube for performing a series of processes, a cooling trap(50) connected with the process tube at one side of the cooling trap(50), a separation valve(58) connected with the other side of the cooling trap(50) and a pump connected with the other side of the separation valve(58). At this point, the semiconductor manufacturing apparatus has the cooling trap(50) having a transparent window(54). At this point, the cooling trap(50) is able to be connected or separated from the process tube and the separation valve(58).