| 摘要 |
PROBLEM TO BE SOLVED: To surely hold even an insulated object. SOLUTION: An electrode 24, which is formed flat almost in the same size as the glass substrates 1, 2, is buried in a holding portion body 23 of the attracting stages 21, 22. A grounding electrode 25, which is formed flat almost in an equal size to that of the electrode 24, is fixed and located to the surfaces of holding portion body 23 in the side opposite to the attracting surface 23A sandwiching the electrode 24. The electrode 24 is connected to the positive side of a DC power source 26, while the grounding electrode 25 is connected to the negative side of the DC power supply 26. When a voltage is applied between the electrode 24 and grounding electrode 25 in the DC power supply 26, an electric field is produced between the electrodes 24, 25 and the periphery thereof. The glass substrates 1, 2 are attracted with a force generated by the negative charges appearing at the surface facing the electrode 24 with dielectric polarization and the positive charges appearing at the attracting surface 23A. COPYRIGHT: (C)2004,JPO |
