| 摘要 |
PURPOSE:To form an excellent conductive film over the inner wall of a funnel efficiently, in a given way, by inserting a conductive-material spraying equipment into the funnel so that the location of the said equipment corresponds to the central axis of the funnel, and coating the inner wall of the funnel with a conductive material by spraying the conductive material out of spraying holes provided in the said equpment, while rotating the said equipment. CONSTITUTION:As illustrated in the figure, a funnel 21 is held in a given position by means of a chuck 23, with a large opening 22 facing downward, and a Dada (conducting material) spraying equipment 24 is inserted from the lower side of the funnel 21 into the funnel 21 so that the location of the equipment 24 corresponds to the central axis of the funnel 21. The equipment 24 has a fine part 24A, which is inserted inside a neck part 25, that is to say, the upper part of the funnel 21, and the entire surface of the equipment 24 is provided with a number of spraying holes 26. The equipment 24, while rotating in the direction as indicated by the arrow, sprays out Dada in liquid form from the holes 26 so as to make the entire wall of the funnel 21 to be coated with next, Dada is stopped from being sprayed out, and an excessive amount of Dada adhering to the funnel 21 is made to drop down. After that, Dada and contaminations existing on and around a sealing end surface 27 of the funnel 21 are removed before Dada is dried up. |
