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发明名称
VERFAHREN ZUM BILDEN ELEKTRISCH LEITENDER DURCHDRINGUNGEN IN DUENNFILMEN
摘要
申请公布号
DD201627(A5)
申请公布日期
1983.07.27
申请号
DD19810232271
申请日期
1981.07.31
申请人
OY LOHJA AB,FI
发明人
ANTSON,JORMA O.,FI
分类号
H05B33/26;G09F13/22;H01L21/3205;H01L21/60;H01L23/52;H01L27/01;H05B33/12;H05K3/40;(IPC1-7):H01L21/28
主分类号
H05B33/26
代理机构
代理人
主权项
地址
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