发明名称 CONVEYOR DEVICE FOR A SUBSTRATE
摘要 The invention relates to a device for transporting a strip-type substrate (1) through a reactor (20), wherein the substrate (1) is held by transport elements (3, 3', 4, 4', 5, 5', 6, 6') which are displaceable by a drive unit (15, 15') in a transport direction (V). The transport means have first transport beams (3, 3', 4, 4') and second transport beams (5, 5', 6, 6') which engage in alternation on the substrate (1), wherein the transport beams which engage on the substrate (1) are moved in the transport direction (V) and the transport beams which do not engage on the substrate are moved in a reverse direction (R) opposite to the transport direction (V). Transport carriages (13, 13', 14, 14') are provided, which are arranged in pairs in the transport direction (V) respectively upstream and downstream of the reactor (20).
申请公布号 WO2016207088(A1) 申请公布日期 2016.12.29
申请号 WO2016EP64117 申请日期 2016.06.20
申请人 AIXTRON SE 发明人 RUPESINGHE, Nalin Lalith;GONCALVES, Goncalo Pedro;TEO, Kenneth B. K.
分类号 C23C14/56;B65G49/06;C23C14/50;C23C16/26;C23C16/54;H01L21/677 主分类号 C23C14/56
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