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发明名称
MOLYBDENUM PLATE
摘要
申请公布号
JPS6276526(A)
申请公布日期
1987.04.08
申请号
JP19850214604
申请日期
1985.09.30
申请人
TOSHIBA CORP
发明人
TAKAHASHI TSUTAE;FUKUHARA YOSHIO;KITAMORI NOBORU
分类号
H01L21/52;C22C27/04;H01L21/58
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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