| 摘要 |
PURPOSE:To realize the scanning type tunnel microscope which enables an optical observation image of a sample surface to be obtained without any shadow of a probe and provides easy conduction to the sample by providing a 1st rough moving means which moves an objective roughly and a 2nd rough moving means which move a probe unit roughly. CONSTITUTION:The probe unit 68 is equipped with a ring-shaped support member 72 and a cylinder type piezoelectric actuator 74 which is fixed to the support member 72 and a probe holder 76 made of an optically transparent plate where the probe 78 stands in the center is fitted to the lower end of the actuator 74. When the sample is observed optically prior to STM measurement, an optical system fixing pedestal 44 is moved by a motor 46 as a 1st rough moving mechanism in a Z direction perpendicular to a sample stage 32. At this time, the support member 54 including the probe unit 68 is moved vertically away from the focus position of an optical system by a micrometer 56 as a 2nd rough moving mechanism so that the probe 78 is not at the focus position of an optical system, and consequently the probe 78 is not recognized as an image, so that the optical observation image of the sample surface can be obtained without any shadow. |
