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发明名称
ALIGNING METHOD FOR WAFER
摘要
申请公布号
JPH08222611(A)
申请公布日期
1996.08.30
申请号
JP19950028006
申请日期
1995.02.16
申请人
FUJITSU LTD
发明人
HIRONUMA MASAYUKI
分类号
G01R31/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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