| 摘要 |
PROBLEM TO BE SOLVED: To permit highly accurate measurement without damaging the surface of an object to be measured. SOLUTION: A stylus 10 is contactlessly supported to a probe body 1 through a first noncontact support means 30, and a contact ball 20 is contactlessly supported to the tip end of the stylus 10 through a second noncontact support means 40. The first noncontact support means 30 is composed of a movable magnetic pole 31 disposed along the outer circumference of the base end side of the stylus 10, and a fixed magnetic pole 33 disposed in the probe body 1 so as to surround the movable magnetic pole 31. A first displacement detection means 50 to detect the axial displacement and radial displacement of the stylus 10, and a second displacement detection means 60 to detect the displacement of the center position of the contact ball 20 with respect to the stylus 10 are added.
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