| 摘要 |
PROBLEM TO BE SOLVED: To extend a stable operation time of an ion source by enhancing the resistance against contamination. SOLUTION: This ion source is provided with two insulators 24 electrically insulating two leg parts 8a of a filament 8 from a plasma generating container 2. Individual insulators 24 comprise an inside insulator 24a and an outside insulator 24b engaged each other with a wall of the plasma generating container 2 sandwiched from the inside and the outside. The individual insulators 24 are structured with two cylinder like insulators 241a and 242a meandering each other to form a labyrinth.
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