TEST METHOD FOR SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To store data for each cell such as a memory test. SOLUTION: In a test method for a semiconductor device in which measurement is performed for a plurality of cells varying measurement conditions and a plurality of measuring points deciding success or failure of the semiconductor device from obtained data of each cell are set, difference data of data of each cell between continuous measuring points of the plurality of measuring point are obtained, and the difference data are stored. Capacity of stored data is reduced by making the stored data as difference data of data of each cell, and storing data for each cell can be performed.