PARALLEL, INDIVIDUALLY ADDRESSABLE PROBE FOR NANOLITHOGRAPHY

摘要

PROBLEM TO BE SOLVED: To provide a microfabricated probe array for nanolithography and a process for designing and fabricating the probe array. SOLUTION: The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading of the variation of transferred patterns. COPYRIGHT: (C)2009,JPO&INPIT