发明名称 |
METHOD AND SYSTEM OF TESTING RESOLUTION |
摘要 |
<p>In an automated inspection procedure, corresponding elements from all the patterns lying along a row of a replicated-pattern mask or wafer are successively imaged onto a storage medium in an interleaved way. At the completion of an inspection cycle, sets of corresponding elements from all the patterns in the row are respectively arrayed in the storage medium in a side-by-side fashion.</p> |
申请公布号 |
JPS51137379(A) |
申请公布日期 |
1976.11.27 |
申请号 |
JP19760050965 |
申请日期 |
1976.05.06 |
申请人 |
WESTERN ELECTRIC CO |
发明人 |
MAACHIN FUERUDOMAN;DONARUDO ROORENSU HOWAITO |
分类号 |
G01B11/00;G01B11/24;G01N21/88;G01N21/956;G03F1/84;G03F7/20;H01L21/027;H01L21/66 |
主分类号 |
G01B11/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|