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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54137972(A)
申请公布日期
1979.10.26
申请号
JP19780045311
申请日期
1978.04.19
申请人
HITACHI LTD
发明人
NONAKA YOSHIO;YAMADA KOUICHIROU
分类号
H01L21/316;H01L21/56
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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