摘要 |
PURPOSE:To conduct sample inclination with high precision using a simple by controlling three pulse motors in response to outputs from an inclination signal generator cirduit and a movement signal generator circuit. CONSTITUTION:When a sample inclination angle is specified by an operator console 32, this information is fed through a converter 33 into a computer 28, which applies control signals to pulse generators 29, 30, 31 to control pulse motors 17, 18, 19. Thereby, an inclination bar is raised or lowered to obtain a predetermined inclination angle of a sample holder 2. When the sample holder 2 is moved horizontally under this status, the amount of the movement is detected by movement mechanisms 15, 16. The computer 28 controls the pulse motors 17, 18, 19 through the pulse generators 29, 30, 31 in response to the input signals from the movement mechanisms 15, 16 and the converter 33, and allows the sample holder 2 move in perspective maintaining the inclination status designated by the operator. |