发明名称 CARRYING MECHANISM FOR OFF-LINE VACUUM ADSORPTION SUBSTRATE AND SUBSTRATE TRANSFERRING METHOD
摘要 A carrying mechanism for an off-line vacuum adsorption glass substrate and a substrate transferring method. The carrying mechanism comprises a carrying frame (1) with clamp holders (11, 12) arranged thereon, a vacuum adsorption device (2) and a separating device (6) arranged on the carrying frame (1), wherein the vacuum adsorption device (2) is used for absorbing and fixing a substrate (5) and connecting or disconnecting with a vacuum pipe (4), and the separating device (6) is used for cutting off the vacuum adsorption device (2) and the vacuum pipe (4) which are connected together and keeping the vacuum adsorption device (2) continuously adsorbing the substrate (5) to be transferred. The fixing effect for the substrate can be enhanced by the carrying mechanism for the off-line vacuum adsorption substrate and the substrate transferring method, and the off-line adsorption for the substrate is achieved.
申请公布号 WO2016206238(A1) 申请公布日期 2016.12.29
申请号 WO2015CN91971 申请日期 2015.10.15
申请人 BOE TECHNOLOGY GROUP CO., LTD.;HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 SHI, Xu;XU, Zhilong;LIU, Jun;WANG, Xiaojun;LI, Dongqing;HUANG, Shutong;CHEN, Wei;ZHANG, Lei
分类号 H01L21/683;G02F1/13 主分类号 H01L21/683
代理机构 代理人
主权项
地址