| 摘要 |
PURPOSE:To efficiently inspect the characteristics of laser diode elements with excellent workability by a method wherein the titled inspecting device is constituted, involving a suction stage, a vertically movable mechanism, a single axle table, two probes and a sensor which detects laser beams. CONSTITUTION:A laser diode bar 7 is put on a suction stage 16 having suction holes in a state that the top electrodes of laser diode elements have been faced upwards and the bar 7 is attractingly fixed onto the stage 16. Then, a feed screw 11 is made to revolve by a driving source such as a motor, etc., and one element on the end of the laser diode bar 7 is made to transfer just below a probe 19a. Moreover, an actuator 14 is actuated, the suction stage 16 is made to rise, the probe 19a is made to contact with the top electrode of the one element on the end of the laser diode bar 7, and a probe 19b is made to contact with the top surface of the suction stage 16. At this time, current is flowed between the probe 19a and the probe 19b, the one element on the end of the laser diode bar 7 is made to luminescence, the emitted light is detected by a sensor 17 and the characteristics of the element is inspected. In the same way, the characteristics of laser diode elements are one after another inspected by making a vertically movable mechanism 12 and a single axle table 9 drive. |
