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发明名称
METHOD OF MOUNTING SEMICONDUCTOR WAFFERS ON ISOLATOR SUBSTRATE
摘要
申请公布号
SU1518834(A1)
申请公布日期
1989.10.30
申请号
SU19874280538
申请日期
1987.07.09
申请人
DANILOV ALEKSANDR V,SU;PERELYGIN ALEKSANDR,SU;PEKOV SERGEJ P,SU
发明人
DANILOV ALEKSANDR V,SU;PERELYGIN ALEKSANDR I,SU;PEKOV SERGEJ P,SU
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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