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发明名称
CMP SLURRY COMPOSITION FOR ORGANIC FILM AND POLISHING METHOD USING THE SAME
摘要
본 발명은 극성 용매, 비극성 용매 중 하나 이상; 및 금속산화물 연마제를 포함하고, 산성이고, 탄소 함량이 50 내지 95atom%인 유기막을 연마하기 위한 유기막 CMP 슬러리 조성물 및 이를 이용한 연마 방법에 관한 것이다.
申请公布号
KR101659144(B1)
申请公布日期
2016.09.23
申请号
KR20140045953
申请日期
2014.04.17
申请人
제일모직주식회사
发明人
최정민;노조, 하루키;박용순;유용식;강동헌;김고은;김태완
分类号
C09K3/14;H01L21/304
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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