| 摘要 |
To provide a vacuum pump that is capable of efficiently heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and is suitable for preventing the accumulation of a product that is caused by a decrease in the temperature of process gas in the vicinity of the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port. |
