| 摘要 |
Provided is a low-noise and high-sensitivity acceleration sensor. Specifically, the first number of openings OP1 are formed in a region of the front surface (SUR1) of a membrane layer (ML), said region corresponding to a heavy-weight portion (HVU) of a mass body (MS), and the second number of openings (OP2) are formed in a region of the rear surface (SUR2) of the membrane layer (ML), said region corresponding to the heavy-weight portion (HVU) of the mass body (MS). The openings (OP1) and the openings (OP2) are connected to each other and a plurality of penetrating portions are formed in the membrane layer (ML), and the first number is more than the second number. |
