发明名称 透明電極付き基板およびその製造方法
摘要 The present invention relates to a substrate with a transparent electrode, which has a transparent electrode layer on at least one surface of a transparent film base material. The transparent film base material has a transparent dielectric material layer containing an oxide as a main component on a surface at the transparent electrode layer side. In one embodiment of the present invention, the transparent electrode layer is a crystalline transparent electrode layer that has a crystallinity degree of 80% or more. In this embodiment, the crystalline transparent electrode layer has a resistivity of 3.5×10−4 &OHgr;·cm or less, a thickness of 15 nm to 40 nm, an indium oxide content of 87.5% to 95.5%, and a carrier density of 4×1020/cm3 to 9×1020/cm3, and the substrate with the transparent electrode preferably has a heat shrinkage start temperature of 75° C. to 120° C. as measured by thermomechanical analysis.
申请公布号 JP6101214(B2) 申请公布日期 2017.03.22
申请号 JP20130555242 申请日期 2013.01.18
申请人 株式会社カネカ 发明人 口山 崇;早川 弘毅;上田 拓明;藤本 貴久;山本 憲治
分类号 H01B5/14;B32B7/02;B32B9/00;C23C14/08;C23C14/34;C23C14/58;H01B13/00 主分类号 H01B5/14
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