发明名称 |
LIQUID DOPING SYSTEMS AND METHODS FOR CONTROLLED DOPING OF SINGLE CRYSTAL SEMICONDUCTOR MATERIAL |
摘要 |
A doping system for introducing liquid dopant into a melt of semiconductor or solar-grade material includes a dopant reservoir for holding dopant and a feeding tube. The dopant reservoir includes a body and a tapered end defining an opening having a smaller cross-sectional area than a cross-sectional area of the body. The feeding tube includes a first end extending from the opening of the reservoir, a second end distal from the first end, an angled tip disposed at the second end of the feeding tube, a first restriction for inhibiting the passage of solid dopant through the feeding tube, and a second restriction for controlling the flow of liquid dopant, the second restriction disposed near the second end of the feeding tube. |
申请公布号 |
EP2938759(B1) |
申请公布日期 |
2017.03.22 |
申请号 |
EP20130817700 |
申请日期 |
2013.12.31 |
申请人 |
MEMC Electronic Materials S.p.A. |
发明人 |
HARINGER, Stephan;GIANNATTASIO, Armando;SCALA, Roberto;BONANNO, Luigi;MOSER, Valentino |
分类号 |
C30B15/04;C30B29/06 |
主分类号 |
C30B15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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