发明名称 基板クランプ装置
摘要 PROBLEM TO BE SOLVED: To allow for correction of un upward warp of a board clamped by a board clamping device.SOLUTION: An upward warp correction unit 31 for correcting un upward warp of a board 13 is arranged movably on a backup plate 16, depending on the length of the board 13 in the transfer direction. The upward warp correction unit 31 is formed by unitizing an upward warp correction member 32 for correcting an upward warp of the board 13 clamped by a board clamping device by holding the front and rear edges of the board 13 clamped by a board clamping device from above, and a position switching mechanism 33 for switching the position of the upward warp correction member 32 between an upper warp correction position for correcting the upward warp of the board 13, and a retreat position not interfering with transfer of the board 13. The upward warp correction unit 31 is provided with a lower warp prevention pin 34 for preventing a lower warp of the board 13 by receiving and supporting the edge of the board 13, held from above by the upward warp correction member 32, from the underside.
申请公布号 JP6086435(B2) 申请公布日期 2017.03.01
申请号 JP20130088424 申请日期 2013.04.19
申请人 富士機械製造株式会社 发明人 川合 英俊
分类号 H05K13/04 主分类号 H05K13/04
代理机构 代理人
主权项
地址