| 发明名称 | Sputter chamber pressure gauge with vibration absorber | ||
| 摘要 | A pressure gauge for measuring pressure in a vacuum chamber includes a flange couplable with the vacuum chamber, a pressure sensor configured to measure pressure, an air valve between the flange and the pressure sensor, and a vibration dampening assembly configured to dampen vibration in the pressure gauge. A sputtering system for sputter deposition includes a sputter chamber and the pressure gauge. The flange of the pressure gauge is coupled with the sputter chamber. A method of measuring pressure in a vacuum chamber with the pressure gauge includes coupling the flange with the vacuum chamber, dampening vibration in the pressure gauge with the vibration dampening assembly, and obtaining a pressure measurement from the pressure sensor. | ||
| 申请公布号 | US9581510(B1) | 申请公布日期 | 2017.02.28 |
| 申请号 | US201414287924 | 申请日期 | 2014.05.27 |
| 申请人 | WESTERN DIGITAL TECHNOLOGIES, INC. | 发明人 | Idris Fadzli B.;Purushothman Ganesen |
| 分类号 | G01L7/00;G01L9/00;G01L19/06;G01L7/06;G01L7/02 | 主分类号 | G01L7/00 |
| 代理机构 | Loza & Loza, LLP | 代理人 | Fitch Gabriel;Loza & Loza, LLP |
| 主权项 | 1. A pressure gauge for measuring pressure in a vacuum chamber, the pressure gauge comprising: a flange couplable with the vacuum chamber; a pressure sensor configured to measure pressure; an air valve between the flange and the pressure sensor; and a vibration dampening assembly disposed between the air valve and the pressure sensor configured to dampen vibration in the pressure gauge. | ||
| 地址 | Irvine CA US | ||