Piezoresistive resonator with multi-gate transistor

摘要

An embodiment includes a first nonplanar transistor including a first fin that includes first source and drain nodes, and a first channel between the first source and drain nodes; a second nonplanar transistor including a second fin that includes second source and drain nodes, and a second channel between the second source and drain nodes; a nonplanar gate on the first fin between the first source and drain nodes and on the second fin between the second source and drain nodes; and first insulation included between the gate and the first fin and second insulation between the gate and the second fin; wherein the gate mechanically resonates at a first frequency when at least one of the gate and the first fin is actuated with alternating current (AC) to produce periodic forces on the gate. Other embodiments are described herein.

主权项

1. A resonator system comprising:
a first nonplanar transistor including a first fin that includes first source and drain nodes, and a first channel between the first source and drain nodes; a second nonplanar transistor including a second fin that includes second source and drain nodes, and a second channel between the second source and drain nodes; and a nonplanar gate on the first fin between the first source and drain nodes and on the second fin between the second source and drain nodes; a direct current (DC) contact, to receive a DC current, coupled to the gate and further coupled to at least one of the first and second fins; and an alternating current (AC) contact, to receive an AC current, coupled to at least one of the gate, the first fin, and the second fin; wherein the first and second fins are not coupled to any other gate between the first source and drain nodes.