| 发明名称 |
SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER |
| 摘要 |
An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method. |
| 申请公布号 |
US2017036272(A1) |
申请公布日期 |
2017.02.09 |
| 申请号 |
US201615296968 |
申请日期 |
2016.10.18 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
LAFARRE Raymond Wilhelmus Louis;DONDERS Sjoerd Nicolaas Lambertus;TEN KATE Nicolaas;DZIOMKINA Nina Vladimirovna;KARADE Yogesh Pramod;RODENBURG Elisabeth Corinne |
| 分类号 |
B22F7/06;B33Y80/00;B33Y10/00;G03F7/20;B22F3/105 |
主分类号 |
B22F7/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
VELDHOVEN NL |
