发明名称 OPTICAL APPARATUS, MEASURING APPARATUS, MEASURING METHOD, SCREENING APPARATUS, AND SCREENING METHOD
摘要 An optical apparatus includes a first optical element and a second optical element capable of separating incident light according to a wavelength of the incident light. The first optical element includes a first separation section having first optical characteristics for reflecting light in a first wavelength band, transmitting light in a second wavelength band, and partially transmitting and partially reflecting light in a third wavelength band. The second optical element includes a second separation section having second optical characteristics for separating incident light that is incident in two wavelength bands including the first wavelength band or the second wavelength band and the third wavelength band into the light in the first wavelength band or the light in the second wavelength band and the light in the third wavelength band according to the wavelength.
申请公布号 US2017038572(A1) 申请公布日期 2017.02.09
申请号 US201415100153 申请日期 2014.12.08
申请人 NIKON CORPORATION 发明人 MORI Susumu;SAITO Tomoya
分类号 G02B21/00;G01N21/64;G02B21/12;G02B5/26;G02B27/14 主分类号 G02B21/00
代理机构 代理人
主权项 1. An optical apparatus, comprising: a first optical element and a second optical element capable of separating incident light according to a wavelength of the incident light, wherein the first optical element includes a first separation section having first optical characteristics for reflecting light in a first wavelength band, transmitting light in a second wavelength band, and partially transmitting and partially reflecting light in a third wavelength band, and the second optical element includes a second separation section having second optical characteristics for separating incident light that is incident in two wavelength bands including the first wavelength band or the second wavelength band, and the third wavelength band into the light in the first wavelength band or the light in the second wavelength band, and the light in the third wavelength band, according to the wavelength.
地址 Tokyo JP