发明名称 PROCESS AND APPARATUS FOR MEASURING AN ORGANIC SOLID SAMPLE BY GLOW DISCHARGE SPECTROMETY
摘要 A system and a process for measuring, by glow discharge spectrometry, the elemental and/or molecular chemical composition of an organic solid sample (10). The sample (10) is positioned so as to seal a glow discharge plasma reactor (2), a gaseous mixture including at least one inert gas and gaseous oxygen is injected into the reactor (2), the concentration of gaseous oxygen being between 0.1% and 15% by weight of the gaseous mixture, an electric discharge of radiofrequency type is applied to the electrodes of the plasma reactor (2) in order to generate a glow discharge plasma, and the solid sample (10) is exposed to the plasma so as to etch an erosion crater in the solid sample (10); at least one signal representative of an ionized species of negative charge is selected and measured using a mass spectrometer (4).
申请公布号 EP3127140(A1) 申请公布日期 2017.02.08
申请号 EP20150718972 申请日期 2015.03.27
申请人 Horiba Jobin Yvon SAS 发明人 CHAPON, Patrick;TEMPEZ, Agnès;LEGENDRE, Sébastien
分类号 H01J49/10 主分类号 H01J49/10
代理机构 代理人
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