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发明名称
VAPOR PHASE GROWING METHOD
摘要
실시형태의 기상 성장 방법은, 반응실, 반송실, 대기실을 구비하는 기상 성장 장치를 이용한다. 제1 기판에 갈륨(Ga)을 함유하는 막을 형성한 후, 지지부에 부착된 부착물을 피복막으로 피복하거나, 또는, 제거한다. 그 후, 표면이 실리콘(Si)인 복수의 기판에 연속해서, 질화알루미늄막을 형성하고, 복수의 기판을 대기실에 반입한다. 그 후, 복수의 기판을 순차 대기실로부터 반응실에 반입하고, 연속해서 갈륨(Ga)을 함유하는 막을 형성한다.
申请公布号
KR101704305(B1)
申请公布日期
2017.02.07
申请号
KR20150188514
申请日期
2015.12.29
申请人
가부시키가이샤 뉴플레어 테크놀로지
发明人
야마다 다쿠미;사토 유우스케
分类号
H01L21/02;H01L21/205
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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