| 发明名称 |
MICROFILTRATION DEVICE |
| 摘要 |
A microfiltration device comprises a substrate having a first surface and a second surface opposite to the first surface. The substrate includes a cavity between the first surface and the second surface. The substrate further includes a microfilter including a frame part in contact with the substrate and a filter part abutting the cavity. The microfilter comprises in both the frame part and the filter part a semiconducting or conducting material. |
| 申请公布号 |
US2017030890(A1) |
申请公布日期 |
2017.02.02 |
| 申请号 |
US201615221010 |
申请日期 |
2016.07.27 |
| 申请人 |
Infineon Technologies AG |
发明人 |
Holweg Gerald;Arnanthigo Yonsuang;Berger Jan;Denifl Guenter;Figueira Da Silva Sylvicley;Moder Iris;Ostermann Thomas;Oswatitsch Alexander;Rajaraman Vijaye Kumar;Stranzl Gudrun |
| 分类号 |
G01N33/49;B01D69/02;B01D71/02;B01D61/14 |
主分类号 |
G01N33/49 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microfiltration device, comprising
a substrate having a first surface and a second surface opposite to the first surface, the substrate including a cavity between the first surface and the second surface, and a microfilter including a frame part in contact with the substrate and a filter part abutting the cavity, the microfilter comprising in both the frame part and the filter part a semiconducting or conducting material. |
| 地址 |
Neubiberg DE |
