| 摘要 |
PROBLEM TO BE SOLVED: To provide high uniformity in a fine pattern in manufacturing a roll-shaped mold.SOLUTION: A fine pattern forming roll (10) for use in manufacturing a roll-shaped mold includes a roll substrate (11) and a resist film (12) formed on the surface of the roll substrate (11). A fine pattern is formed on the roll-shaped mold using the resist film (12) as a mask. The fine pattern of the roll-shaped mold has a pitch of 1 nm or more and 1 μm or less. The film thickness of the resist film (12) is 10 nm or more and 1000 nm or less. The distribution of the film thickness of the resist film (12) is ±2.0% or less. |
