发明名称 Differential temperature surface sensor
摘要 This sensor, comprises: a first surface acoustic wave device, comprising a first piezoelectric substrate, formed from a (YXw lt )/ Õ / ¸ / È cut of a Langasite crystal, where Õ is equal to 0 ± 5° , ¸ is equal to 55 ± 20° and È is equal to 32.5 ± 7.5° and a first resonator having a first transducer laying on a first propagation surface and having two sets of interdigitated first electrodes formed from an electrically conductive material having a high melting temperature; and a second surface acoustic wave device, comprising a second piezoelectric substrate, formed from a (YXw lt )/ Õ / ¸ / È cut of a Langasite crystal, where Õ is equal to 0 ± 5° , ¸ is equal to 5 ± 20° and È is equal to 0 ± 7.5°, and a second resonator having a second transducer laying on a second propagation surface and having two sets of interdigitated second electrodes formed from an electrically conductive material having a high melting temperature; said first and second surface acoustic wave devices being independent one from the other in terms of surface acoustic wave propagation.
申请公布号 EP2980550(B1) 申请公布日期 2017.01.25
申请号 EP20140306210 申请日期 2014.07.28
申请人 Centre National de la Recherche Scientifique (C.N.R.S.);ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES 发明人 Francois, Bruno;Ballandras, Sylvain;Richter, Denny
分类号 G01K11/26 主分类号 G01K11/26
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