| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface protective sheet suitably used in the back grinding process of a work having a modified region formed therein, and preventing contamination of the protected surface of a work, by suppressing ingress of water from a gap, formed when the work is fractured, onto the protected surface of the work during the back grinding process of the work.SOLUTION: A surface protective sheet having an adhesive layer on a base material satisfies following requirements (a)-(d). (a) Young's modulus of the base material is 450 MPa or more. (b) Storage modulus of the adhesive layer at 25°C is 0.10 MPa or more. (c) Storage modulus of the adhesive layer at 50°C is 0.20 MPa or less. (d) Thickness of the adhesive layer is 30 μm or more. |
