发明名称 SPUTTERING TARGET ASSEMBLY
摘要 Provided is a sputtering target assembly that includes a plurality of mounting sections which are disposed on a backing plate, which are disposed with a gap therebetween, and on each of which one or more sputtering target members are disposed via a bonding material. The sputtering target assembly has a Ni base material coating in gaps between the adjacent mounting sections.
申请公布号 WO2017002445(A1) 申请公布日期 2017.01.05
申请号 WO2016JP63552 申请日期 2016.05.02
申请人 KOBELCO RESEARCH INSTITUTE, INC. 发明人 TAKAGI, Katsutoshi;KANAMARU, Moriyoshi;HIROSE, Kenta;IWASAKI, Yuki
分类号 C23C14/34;H01L21/203 主分类号 C23C14/34
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