发明名称 |
METHOD AND APPARATUS FOR CURING THIN FILMS ON LOW-TEMPERATURE SUBSTRATES AT HIGH SPEEDS |
摘要 |
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor con-trol module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information. |
申请公布号 |
CA2730296(C) |
申请公布日期 |
2017.01.03 |
申请号 |
CA20092730296 |
申请日期 |
2009.04.01 |
申请人 |
NCC NANO, LLC |
发明人 |
SCHRODER, KURT A.;MARTIN, KARL M.;JACKSON, DOUG K.;MCCOOL, STEVEN C. |
分类号 |
B01J19/06;B29C71/04;H01L49/02;H05K3/12;H05K3/22 |
主分类号 |
B01J19/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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