发明名称 トンネル電界効果トランジスタ、その製造方法およびスイッチ素子
摘要 A tunnel field-effect transistor (TFET) is configured by disposing a III-V compound semiconductor nano wire on a (111) plane of a IV semiconductor substrate exhibiting p-type conductivity, and arbitrarily disposing electrodes of a source, drain and gate. Alternatively, the tunnel field-effect transistor is configured by disposing a III-V compound semiconductor nano wire on a (111) plane of a IV semiconductor substrate exhibiting n-type conductivity, and arbitrarily disposing electrodes of a source, drain and gate. The nano wire is configured from a first region and a second region. For instance, the first region is intermittently doped with a p-type dopant, and the second region is doped with an n-type dopant.
申请公布号 JP5999611(B2) 申请公布日期 2016.09.28
申请号 JP20150531725 申请日期 2014.08.12
申请人 国立大学法人北海道大学;国立研究開発法人科学技術振興機構 发明人 福井 孝志;冨岡 克広
分类号 H01L21/336;B82Y10/00;B82Y40/00;H01L21/20;H01L29/06;H01L29/41;H01L29/417;H01L29/66;H01L29/78 主分类号 H01L21/336
代理机构 代理人
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