发明名称 A PELLICLE
摘要 A pellicle is proposed in which a mask-bonding agglutinant layer, that bonds the pellicle to a photomask, is divided into segments, and the vacancies thus created between these segments are entirely occupied by segments of a non-resilient body layer, and these alternately arranged segments are flush with each other.
申请公布号 EP3037877(A2) 申请公布日期 2016.06.29
申请号 EP20150197716 申请日期 2015.12.03
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 KAZUTOSHI, SEKIHARA
分类号 G03F1/00;G03F1/62;G03F1/64 主分类号 G03F1/00
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