发明名称 半導体装置及びその製造方法
摘要 The present invention is applicable to a semiconductor device having a plurality of chips being stacked with a TSV structure in which adjacent ones of the chips are connected to each other via a plurality of through electrodes. Each of the chips includes a plurality of TSV array portions provided so as to correspond to a plurality of channels. The TSV array portions include a TSV array portion that contributes to an input and an output depending upon the number of the chips being stacked, and a pass-through TSV array portion that is not connected to an input/output circuit.
申请公布号 JP5932267(B2) 申请公布日期 2016.06.08
申请号 JP20110188141 申请日期 2011.08.31
申请人 ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. 发明人 野本 敬介;石川 透
分类号 H01L27/10;H01L21/8242;H01L25/065;H01L25/07;H01L25/18;H01L27/108 主分类号 H01L27/10
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