发明名称 |
RADIATION DETECTOR COMPRISING A COMPENSATING SENSOR |
摘要 |
A chip (100) for radiation measurements, the chip comprising a first substrate (110) comprising a first sensor (111) and a second sensor (116). The chip (100) moreover comprises a second substrate (120) comprising a first cavity (121) and a second cavity (126) both with oblique walls. An internal layer (128) is present on the inside of the second cavity (126). The second substrate (120) is sealed to the first substrate with the cavities (121, 126) on the inside such that the first cavity (121) is above the first sensor (111) and the second cavity (126) is above the second sensor (116). |
申请公布号 |
EP3026406(A1) |
申请公布日期 |
2016.06.01 |
申请号 |
EP20150196154 |
申请日期 |
2015.11.24 |
申请人 |
MELEXIS TECHNOLOGIES NV |
发明人 |
VAN BUGGENHOUT, CARL;VAN DER WIEL, APPOLONIUS JACOBUS;BUYDENS, LUC |
分类号 |
G01J1/02;G01J1/42;G01J5/02;G01J5/04;G01J5/06;G01J5/08;G01J5/12;H01L27/146;H01L31/0203;H01L31/0216 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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