| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device capable of improving deformation efficiency of a piezoelectric element while securing reliability of the piezoelectric element, a liquid injection head and a liquid injection device.SOLUTION: The piezoelectric device includes: a diaphragm 21 in which an insulator layer 18 is laminated on an elastic layer 17; and a piezoelectric element 19 which is formed by laminating a lower electrode layer 27, a piezoelectric layer 28 and an upper electrode layer 29 successively from a surface of the insulator layer 18. The lower electrode 27 is provided in a first region P1 where bending deformation of the diaphragm 21 is allowed, and the upper electrode 29 is provided continuously from the first region P1 to a second region P2 that is outside of the region, on the other hand, in the second region P2, the piezoelectric layer 28 is formed to the outside of the lower electrode layer 27. In a third region P3, the upper electrode layer 29 is laminated on the elastic layer 17 by removing the insulator layer 18 in a region outside of the piezoelectric layer 28.SELECTED DRAWING: Figure 6 |
