FORM MEASURING MACHINE AND FORM MEASURING METHOD

摘要

A form measuring machine includes: a scanning probe including a stylus with a tip ball and a probe body attached with the stylus; a movable slider supporting the scanning probe; a scale detecting a slider displacement of the slider; a tip ball displacement detector detecting a tip ball displacement of the tip ball; and an arithmetic unit calculating a measurement value based on the slider displacement, the tip ball displacement and a correction filter and comprising a correction filter setting section that: calculates a correction matrix diagonal component from the slider displacement and the tip ball displacement detected by calibration of the scanning probe; and calculates a correction factor of the correction filter from the correction matrix diagonal component to set the correction filter.

主权项

1. A form measuring machine comprising:
a scanning probe comprising: a stylus with a tip end provided with a tip ball that is brought into contact with an object to be measured; and a probe body attached with the stylus; a movable slider configured to support the scanning probe; a scale configured to detect a slider displacement of the slider; a tip ball displacement detector configured to detect a tip ball displacement of the tip ball of the scanning probe relative to a support portion where the slider supports the scanning probe; and an arithmetic unit configured to calculate a measurement value based on the slider displacement detected by the scale, the tip ball displacement detected by the tip ball displacement detector, and a correction filter configured to correct a measurement error, the arithmetic unit comprising a correction filter setting section configured to: calculate a correction matrix diagonal component from the slider displacement detected by the scale and the tip ball displacement detected by the tip ball displacement detector during measurement of a calibration reference piece; and calculate a correction factor of the correction filter from the correction matrix diagonal component to set the correction filter, the correction matrix associating the tip ball displacement with a coordinate system for the scale.