MOLD MANUFACTURING METHOD AND ANTI-REFLECTIVE FILM MANUFACTURING METHOD

摘要

A method for manufacturing a mold having a surface with multiple depressions, the two dimensional sizes of which are 10 nm to less than 500 nm when viewed from the direction normal to the surface, includes: (a) a step for preparing a mold base material (10); (b) a step for forming a porous alumina layer (14) having multiple depressions (14p) by partial anodization of an aluminum alloy layer (18); (c) a step for expanding the multiple depressions by bringing the porous alumina layer into contact with an etching solution; (d) a step for detecting projections (210) formed on the surface of the porous alumina layer or the mold base material; (e) a step for assessing whether or not the height of a detected projection is higher than a previously determined height; and (f) a step for making the height of the projection less than the previously determined height by irradiation of laser light on the projection when the projection is determined to be higher in step (e).