METHOD FOR PRODUCING RUTHENIUM OXIDE POWDER

摘要

PROBLEM TO BE SOLVED: To provide a ruthenium oxide powder production method that can produce a ruthenium oxide powder at a low cost as an electronic component material of a chip resistor, a hybrid IC, or a resistor network having satisfactory performance even if the content of ruthenium is low.SOLUTION: In a production method for producing a ruthenium oxide (RuO) powder having a rutile type crystal structure and containing Ru in an amount of 73 mass% or more, a hydrated ruthenium oxide powder is used and subjected to heat treatment at a temperature of more than 400°C and not more than 800°C for less than 60 minutes in an oxidizing atmosphere.SELECTED DRAWING: None