PREPARATION METHOD OF REUSE ITO TARGET BY THERMAL SPRAY

摘要

The present invention relates to a method for manufacturing a reused indium tin oxide (ITO) target using an ITO waste target, comprising a step (a) for de-bonding an ITO waste target having a first surface where a consumed part is formed from a backing plate; a step (b) of coating the first surface of the ITO waste target with ceramic or metal powder through thermal spraying to fill the consumed part; a step (c) of processing the first surface of the coated ITO target; and a step (d) of bonding the first surface of the processed ITO target to the backing plate. According to the present invention, a coated layer is formed on the consumed part of the ITO waste target through thermal spraying, thereby reducing the used amount of ITO.